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The Influence of Silicon Nanopillars Structure as the Substrate on the SnO 2 ‐Based Gas Sensor
Author(s) -
Liu Jing,
Xu Yuanze,
Liang Xiaoxiao,
Yan Mingming,
Wang Bo,
Zhang Tianchong,
Yi Futing
Publication year - 2021
Publication title -
chemistryselect
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.437
H-Index - 34
ISSN - 2365-6549
DOI - 10.1002/slct.202004780
Subject(s) - nanopillar , materials science , annealing (glass) , silicon , sputtering , nanotechnology , sputter deposition , thin film , substrate (aquarium) , optoelectronics , nanostructure , composite material , oceanography , geology
Tin dioxide (SnO 2 ) film is fabricated on the Silicon (Si) nanopillars surface with more than 5 aspect ratio via direct current (DC) magnetron sputtering for the first time. Form the XRD curves, SnO 2 film become multi‐crystalline after annealing at 750 °C with 2 hours, and the nanopillars substrates have no influence on the crystallization of the SnO 2 film. For the morphology, the SnO 2 film on the polished Si surface becomes from planar to plicated after annealing, while there is no morphology change of the SnO 2 film on Si nanopillars surface, which proves that the Si nanopillars surface is more suitable for heat and stress release during the annealing process. After testing the gas sensor properties of the SnO 2 based gas sensors, the results reveal that the nanopillars based gas sensors have the higher gas response than the planar ones no matter for ethanol or acetone, with or without Au decoration. The Si nanopillars substrate with high aspect ratio makes the SnO 2 film to have a larger surface to contact with air and target gas, and to have more defects to react with O 2 and reducing gas molecules, which may be a promise method to fabricate the gas sensor with high response.