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High Performance, Low Cost Electromechanical Systems Based on Electrostatically Actuated TiS 2 Belts
Author(s) -
HosseiniShokouh Seyed Hossein,
Fardindoost Somayeh,
Iraji zad Azam
Publication year - 2017
Publication title -
chemistryselect
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.437
H-Index - 34
ISSN - 2365-6549
DOI - 10.1002/slct.201700236
Subject(s) - resonator , materials science , resonance (particle physics) , q factor , stiffening , finite element method , semiconductor , optoelectronics , quality (philosophy) , transition metal , low frequency , condensed matter physics , acoustics , composite material , structural engineering , atomic physics , physics , telecommunications , chemistry , engineering , quantum mechanics , biochemistry , catalysis
TiS 2 , as a family member of Transition Metal Dichalcogenides (TMDs), shows a unique property of semi‐metallic to semiconductor transition when going from bulk to few layered structure. In this paper, an electromechanical resonator based on TiS 2 ribbons with semi‐metallic characteristic is presented. Electrical readout of the mechanical vibratory response of TiS 2 ribbons is measured by employing electrostatic actuation. A typical resonator includes a number of overlapped ribbons with approximate width and thickness of 600 nm and 250 nm respectively along with a suspended length of 5 μm. A typical resonator shows a resonance frequency of around 153 MHz with a quality factor (Q) of about 1000 in air at ambient conditions. Also, the resonance frequency of the introduced resonator increases as the bias potential is increased due to the electrostatic spring‐stiffening effect. Moreover, finite element simulation shows that the reported frequency of resonance and extracted electrical parameters are relevant.