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Comment on the possibility of partial deconvolution of SIMS depth profiles in ‘an analytic form for the SIMS response function measured from ultra‐thin impurity layers’ by M. G. Dowsett et al. [ Surf. Interface Anal. 21, 310 (1994)]
Author(s) -
Makarov V. V.
Publication year - 1995
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740231308
Subject(s) - deconvolution , chemistry , analytical chemistry (journal) , physics , mathematics , optics , chromatography