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Study of electron backscattering within the approximation of discrete flows
Author(s) -
Borodyansky S.,
Tougaard S.
Publication year - 1995
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740231007
Subject(s) - inelastic mean free path , electron , scattering , inelastic scattering , elastic scattering , cross section (physics) , anisotropy , computational physics , physics , electron scattering , atomic physics , optics , quantum mechanics
The path length distribution function (PLDF) for backscattered electrons was calculated within the four‐flow approximation. The problem was solved by using the invariant‐embedding approach. It was shown that the PLDF is very sensitive to the variation of the parameter describing the elastic scattering cross‐section's anisotropy. Methods of calculation of a probability of elastic electron backscattering and methods of reflection energy‐loss spectroscopy processing for calculating the electron differential inelastic scattering cross‐section are also discussed.