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Use of Zr − secondary ion energy distributions and factor analysis to construct chemical‐state depth profiles in SIMS
Author(s) -
Splinter S. J.,
van der Heide P. A. W.,
Lin A.,
McIntyre N. S.
Publication year - 1995
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740230902
Subject(s) - auger , analytical chemistry (journal) , chemistry , zirconium , ion , secondary ion mass spectrometry , yield (engineering) , chemical state , ion beam analysis , energy (signal processing) , atomic physics , materials science , ion beam , statistics , metallurgy , inorganic chemistry , mathematics , physics , x ray photoelectron spectroscopy , nuclear magnetic resonance , organic chemistry , chromatography
Factor analysis (FA), the multivariate statistical technique, has been used to extract chemical bonding information from SIMS secondary ion energy distributions. The method is outlined in detail and shown to be capable of constructing quantitative profiles for the chemical states of zirconium present in ZrO 2 /Zr and ZrN x /Zr structures. In addition, a truncated data collection procedure wherein secondary ion intensity values are collected at a fixed number of emission energy values during the depth profile is outlined. This method, which enables data to be collected in a shorter time and from a smaller sample volume, is subsequently shown to yield reliable results, as confirmed by FA of Auger depth profiles on similar specimens.