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Test of elastic electron scattering corrections for quantitative XPS
Author(s) -
Tougaard S.,
Jablonski A.
Publication year - 1995
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740230716
Subject(s) - elastic scattering , scattering , electron scattering , photoionization , inelastic scattering , electron , atomic physics , monte carlo method , physics , standard deviation , mott scattering , scattering theory , formalism (music) , x ray photoelectron spectroscopy , computational physics , quantum mechanics , small angle neutron scattering , ionization , mathematics , statistics , nuclear magnetic resonance , ion , neutron scattering , musical , art , visual arts
Ratios of the experimental XPS peak intensities from seven metals were compared to two first‐principle theories corresponding to neglecting and including the effects of elastic electron scattering, i.e. the common formalism and the Monte Carlo model, respectively. The theoretical peak intensities were found to change by an average of 14% as a result of elastic scattering, but the standard deviation from experiment was practically the same, namely ∼15% for both theories. The deviation between experiment and theory is found to be random when elastic scattering is neglected, while a small systematic component is revealed when elastic scattering effects are included. The fact that no general reduction is observed in the deviation between experiment and theory is attributed to the error origination from parameters like the photoionization cross‐sections and the inelastic electron mean free paths. These errors apparently overshadow to a large extent the improvements of including the effects of elastic electron scattering.