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NIST oxide‐marker‐layer standard reference material (SRM 2136) for depth profile analysis
Author(s) -
Fine Joseph,
Navinsek Boris
Publication year - 1995
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740230609
Subject(s) - nist , calibration , layer (electronics) , materials science , characterization (materials science) , analytical chemistry (journal) , thin layer , oxide , mass spectrometry , chemistry , composite material , metallurgy , chromatography , nanotechnology , computer science , physics , quantum mechanics , natural language processing
A chromium thin‐film structure containing thin oxide layers was developed specifically for secondary ion mass spectrometry calibration of sputtered depths and erosion rates. Information on its structure and characterization is summarized. It is available from NIST as Standard Reference Material 2136.