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Evaluation of in‐depth resolution in grimm‐type glow discharge optical emission spectrometry from differentiated depth profiles
Author(s) -
Hamada Takahiro,
Wagatsuma Kazuaki,
Hirokawa Kichinosuke
Publication year - 1995
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740230404
Subject(s) - glow discharge , resolution (logic) , analytical chemistry (journal) , penetration depth , mass spectrometry , chemistry , high resolution , substrate (aquarium) , materials science , optics , plasma , remote sensing , physics , geology , chromatography , quantum mechanics , artificial intelligence , computer science , oceanography
Abstract Depth profiling of surface coatings is the most significant field in analytical applications of glow discharge optical emission spectrometry. This paper suggests a method for evaluating the depth resolution of the profiles. For this purpose, the emission intensities that are differentiated as a function of sample depth can be used. The differentiated intensities follow a characteristic curve at the coating/substrate interface. The analyses of the differential curve provide useful knowledge about the depth resolution interface.