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Quantitative GDOS analysis of oxide films on steels
Author(s) -
Suzuki S.,
Suzuki K.,
Mizuno K.
Publication year - 1994
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740220132
Subject(s) - sputtering , glow discharge , analytical chemistry (journal) , oxide , chemical composition , materials science , oxygen , emission spectrum , emission intensity , chemistry , thin film , metallurgy , luminescence , optoelectronics , plasma , nanotechnology , spectral line , physics , organic chemistry , chromatography , quantum mechanics , astronomy
A method for the quantitative analysis for oxide films on steels by means of glow discharge optical emission spectrometry (GDOS) was investigated. Effective optical emission yields for analysed elements were determined by measuring the emission intensities and sputtering rates of standard samples during discharging under constant conditions. The chemical composition in oxidized samples was obtained from the emission intensities and the effective emission yields, while the sputtered depth was calculated from the emission intensities and effective densities of elements. From measurements of the sputtering of magnetite the effective density for oxygen was estimated as 1820 kg m −3 . It was shown that GDOS can be used to determine the quantitative composition and the thickness of the oxide layers on steels.