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Glancing incidence X‐ray analysis: Forgotten or to be discovered?
Author(s) -
v.d. Hoogenhof W. W.,
de Boer D. K. G.
Publication year - 1994
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.7402201121
Subject(s) - x ray reflectivity , surface finish , x ray fluorescence , instrumentation (computer programming) , layer (electronics) , materials science , optics , reflectivity , interface (matter) , nanotechnology , thin film , fluorescence , computer science , physics , composite material , operating system , capillary number , capillary action
Many analysis methods can be used to characterize surfaces and interfaces of thin layered materials. Glancing incidence x‐ray analysis (GIXA) has the potential of being one of the most powerful and versatile analysis methods that can be used because it combines x‐ray reflectivity (XRR) and x‐ray fluorescence (XRF). This technique enables the non‐destructive determination of layer thickness, interface roughness and elementary depth profile. Sophisticated laboratory instrumentation is described which enables materials to be characterized in detail using newly developed analysis algorithms.