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Formation of barium carbide during AES depth profiling of thin BaF 2 films
Author(s) -
Kashin G. N.,
Makhnjuk V. I.
Publication year - 1994
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740211209
Subject(s) - barium , materials science , barium fluoride , graphite , carbide , thin film , recoil , analytical chemistry (journal) , inorganic chemistry , chemistry , metallurgy , nanotechnology , atomic physics , chromatography , physics , nuclear physics
Abstract Investigations of barium fluoride thin films by AES were performed. During AES depth profiling we observed the transformation of surface carbon from graphite to carbide form. The role of ion and electron bombardment in such a transformation has been investigated. We suggest that under Ar + bombardment the surface barium carbide is formed due to recoil implantation of surface carbon atoms into the barium fluoride film and subsequent chemical reaction with barium.