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Incorporation of elastic scattering into composition–depth profile reconstruction from angle‐resolved Auger/XPS data
Author(s) -
Dwyer V. M.
Publication year - 1994
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740210907
Subject(s) - overlayer , auger , x ray photoelectron spectroscopy , scattering , auger electron spectroscopy , spectral line , auger effect , materials science , analytical chemistry (journal) , chemistry , atomic physics , optics , physics , nuclear magnetic resonance , nuclear physics , astronomy , chromatography
Neglecting elastic scattering in the inversion process for reconstructing composition–depth profiles from angle‐resolved Auger/XPS spectra leads to several effects that are likely to be misinterpreted. For example, there appears to be an erroneous diffusion of the substrate material to the surface in the case of a simple overlayer. In addition, the thickness of the overlayer is likely to be overestimated by typically ∼20% for Auger/XPS energies.