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Factor analysis as a tool to deconvolute auger spectra of tungsten nitrides and carbides
Author(s) -
Reniers F.,
Hubin A.,
Terryn H.,
Vereecken J.
Publication year - 1994
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740210628
Subject(s) - auger , tungsten , nitride , carbide , tungsten carbide , auger electron spectroscopy , materials science , nitrogen , sputtering , metal , spectral line , analytical chemistry (journal) , metallurgy , chemistry , atomic physics , nanotechnology , thin film , physics , nuclear physics , layer (electronics) , organic chemistry , astronomy , chromatography
Factor analysis was applied to Auger sputter profiles of tungsten carbide and nitride samples. It is shown that very weak differences in the shapes of the metal peaks due to the presence of C and N can be isolated unambiguously by factor analysis. The different chemical states of carbon, nitrogen and tungsten were clearly identified.