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Practical energy scale calibration procedure for auger electron spectrometers using a spectrometer offset function
Author(s) -
Fujita Daisuke,
Yoshihara Kazuhiro
Publication year - 1994
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740210403
Subject(s) - spectrometer , calibration , offset (computer science) , auger electron spectroscopy , auger , electron spectrometer , energy (signal processing) , scale (ratio) , optics , electron , computational physics , physics , atomic physics , computer science , nuclear physics , cathode ray , quantum mechanics , programming language
In order to share AES spectral data and to develop an Auger spectra database, a practical and simple procedure for calibratiing the energy scale of Auger electron spectrometers has been developed. The procedure is based on the use of a spectrometer offset function, which enables transformation of measurements on the uncalibrated energy scale to a Fermi‐level‐referenced energy scale. In order to evaluate the effectiveness of this calibration method, a round‐robin test involving twelve spectrometers of various types has been performed. From a comparison of Ni L 3 VV and M 3 VV peak positions, it was found that the scatter among the measurements after calibration was reduced to 20–30% of the scatter before calibration.