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On the applicability of tougaard background subtraction to general auger spectra
Author(s) -
Bender Hugo
Publication year - 1994
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740210207
Subject(s) - auger , background subtraction , sensitivity (control systems) , spectral line , subtraction , differential (mechanical device) , atomic physics , mode (computer interface) , chemistry , computational physics , physics , optics , mathematics , quantum mechanics , thermodynamics , computer science , pixel , arithmetic , electronic engineering , engineering , operating system
The Tougaard inelastic background subtraction algorithm is applied to the Auger spectra of a set of elemental standards including all kinds of Auger transitions. The problems occurring with certain transitions are discussed. The relative area sensitivity factors are calculated and compared with the sensitivity factors in differential mode and with theoretically calculated Auger yields. The relative sensitivity in direct mode using full peak integrations is larger than in differential mode. The experimental area sensitivity agrees remarkably well with theoretical predictions.