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Composition and physical properties of thin a‐C:N and a‐C:N:H films deposited by ion beam techniques
Author(s) -
Zorman Christian A.,
Shiao Jeansong,
Heidger Susan,
Hoffman Richard W.
Publication year - 1994
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740210206
Subject(s) - elastic recoil detection , raman spectroscopy , analytical chemistry (journal) , thin film , materials science , spectroscopy , vickers hardness test , ion beam , ion beam analysis , diamond , silicon , absorption spectroscopy , rutherford backscattering spectrometry , absorption edge , carbon fibers , carbon film , diamond like carbon , ion , band gap , chemistry , optics , nanotechnology , microstructure , metallurgy , optoelectronics , composite material , physics , organic chemistry , chromatography , quantum mechanics , composite number
Thin a‐C, a‐C:N, a‐C:H and a‐C:N:H films were deposited onto silicon, glass and graphite substrates using ion beam techniques. Rutherford backscattering spectroscopy and elastic recoil detection analysis were performed in order to determine their atomic composition. The hardness of these films was measured using a Vickers hardness diamond indenter. The as‐deposited a‐C:H and a‐C:N:H films were characterized using optical absorption spectroscopy, while the a‐C and a‐C:N films were studied by Raman spectroscopy. A shift of the absorption edge toward the lower energy region and a lower gap of a‐C:N:H films was observed. The Raman spectra of a‐C:N films show an increase in the I (D)/ I (G) ration, as compared to those of non‐nitrogenated diamond‐like carbon films. A possible structure is suggested.