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Effects of elastic scattering on energy spectra of emitted and backscattered electrons
Author(s) -
Borodyansky S.
Publication year - 1993
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740201002
Subject(s) - elastic scattering , electron , scattering , inelastic scattering , inelastic mean free path , atomic physics , photoelectric effect , spectral line , x ray raman scattering , mott scattering , physics , auger effect , electron scattering , computational physics , optics , small angle neutron scattering , nuclear physics , quantum mechanics , neutron scattering
The problem of elastic and inelastic scattering of Auger electrons, photoelectrons and backscattered electrons is investigated. The path length distribution functions for emitted and backscattered electrons are calculated analytically in different approximations for elastic scattering. The calculations are carried out on the basis of an invariant‐embedding approach. A procedure of background subtraction in AES/XPS in the presence of elastic scattering and a procedure of reflection electron energy‐loss spectra processing are also discussed.