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A new experimental procedure for the backscattering correction in Auger analysis
Author(s) -
Benhayoune H.,
Jbara O.,
Thomas X.,
Mouze D.,
Cazaux J.
Publication year - 1993
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740200710
Subject(s) - auger , auger electron spectroscopy , spectral line , atomic physics , auger effect , chemistry , materials science , optics , physics , nuclear physics , astronomy
From the experimental determination of the electron backscattering factor η (using a positively polarized specimen holder) and applying an analytical expression correlating η and the Auger backscattering factor r , we demonstrate experimentally the possibility of correcting Auger spectra and profiles from the backscattering effects.