Premium
Description of the influence of elastic scattering of electrons in the specimen and in an adventitious hydrocarbon overlayer on photoelectron signals by effective values of the inelastic mean free path and the asymmetry parameter
Author(s) -
Ebel H.,
Ebel M. F.,
Svagera R.,
Pöhn C.,
Jablonski A.
Publication year - 1993
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740200705
Subject(s) - inelastic mean free path , overlayer , mean free path , asymmetry , inelastic scattering , electron , x ray photoelectron spectroscopy , photoelectric effect , elastic scattering , chemistry , inelastic neutron scattering , scattering , atomic physics , substrate (aquarium) , physics , molecular physics , condensed matter physics , optics , nuclear magnetic resonance , nuclear physics , quantum mechanics , geology , oceanography
The influence of elastic scattering of photoelectrons in the substrate and in an adventitious hydrocarbon overlayer on the effective inelastic mean free path and the effective asymmetry parameter has been investigated by Monte Carlo calculation. The results are representative of 27 chemical elements, asymmetry parameters 0.6 ⩽ β ⩽ 2.0, kinetic electron energies 300 ⩽ E kin ⩽ 1500 eV and overlayer thicknesses 0 ⩽ t ⩽ 26.6 Å. For an application in quantitative surface analysis by XPS we propose the use of the effective inelastic mean free path (0.951 IMFP, tabulated values) and the effective asymmetry parameter β eff . The calculation of β eff is performed by tabulated values of β, inelastic mean free paths and measured reduced thicknesses of the hydrocarbon layer.