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The effect of energy‐dependent detector efficiency in electron spectroscopic methods: XPS, AES and DCEMS
Author(s) -
Kajcsos Zs.,
Meisel W.,
Griesbach P.,
Gütlich P.
Publication year - 1993
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740200610
Subject(s) - electron , range (aeronautics) , detector , x ray photoelectron spectroscopy , atomic physics , spectroscopy , energy (signal processing) , electron spectroscopy , analytical chemistry (journal) , chemistry , materials science , computational physics , physics , nuclear physics , optics , nuclear magnetic resonance , quantum mechanics , chromatography , composite material
Systematic studies were performed to investigate the distorting effect of the electron energy dependence of the channeltron detector efficiency on the shape of data distributions in electron spectroscopy. In agreement with earlier results for electron energies up to 3 keV, it was found that a virtually energy‐independent shape of the electron distribution might be achieved even in a very broad range of electgron energies (up to 15 keV) by appropriate selection of the operational high voltage of a channeltron. However, the efficieny of channeltrons was also found to depend on count rates, indicating one of the principal difficulties in comparing distribution recorded under different experimental conditions.