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Work function contrast detection for testing the cleanliness of ion‐bombarded surfaces in Auger microanalysis
Author(s) -
Frank Luděk
Publication year - 1993
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740200406
Subject(s) - microanalysis , work function , auger , electron probe microanalysis , auger electron spectroscopy , contrast (vision) , ion , work (physics) , scanning electron microscope , auger effect , analytical chemistry (journal) , chemistry , electron , secondary electrons , atomic physics , materials science , optics , electrode , physics , composite material , nuclear physics , organic chemistry , thermodynamics , chromatography
Significant contrast differences between linescans in an energy‐filtered total electron emission taken at several tens of electron‐volts and at several hundreds of electron‐volts show up remarkably small differences in surface chemical composition, i.e. local differences in the work function on a partially cleaned surface, so that comparison of such scans can be used as a test for the cleanliness of a rough surface. The comparison can be quantified by a single numerical quantity which allows one to monitor the cleaning process.