Premium
Exact analytical solutions and close approximations to the depth distribution function in AES and XPS
Author(s) -
Dwyer V. M.,
Richards J. M.
Publication year - 1993
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740200402
Subject(s) - x ray photoelectron spectroscopy , distribution function , boltzmann equation , simple (philosophy) , function (biology) , distribution (mathematics) , computational physics , scattering , chemistry , statistical physics , analytical chemistry (journal) , physics , mathematical analysis , mathematics , thermodynamics , optics , nuclear magnetic resonance , chromatography , philosophy , epistemology , evolutionary biology , biology
This paper presents an analysis of the form of the depth distribution function (DDF) for one of the only scattering cross‐sections for which a solution to the Boltzmann transport equation (BTE) is readily available. In doing so we demonstrate how different approximations lead to DDFs of differing complexity. The possibility of achieving the requirement for quantitative AES and XPS of a simple yet accurate DDF is discussed.