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In‐depth distribution analysis of non‐flat surfaces
Author(s) -
Dang Tuan A.,
Cuddy Joann,
Yang Shawn
Publication year - 1993
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740200206
Subject(s) - sputtering , plasma , conical surface , materials science , ion , resolution (logic) , erosion , chemistry , composite material , nanotechnology , physics , thin film , geology , nuclear physics , paleontology , organic chemistry , artificial intelligence , computer science
Abstract Comparison studies of plasma and ion gun sputtering on several types of non‐flat surfaces (Au‐plated Mo wires, W spheres) have shown a superior uniformity of lateral erosion in plasma sputtering. Conical structures, absent in plasma sputtering, have frequently formed in ion gun sputtering. A superior depth‐resolution plasma depth profile consequently results.