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ESCA study of the oxidation of DHP copper
Author(s) -
Pedocchi L.,
Billi A.,
Marinelli E.,
Wu J. X.,
Rovida G.
Publication year - 1992
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740190177
Subject(s) - copper , metaphosphate , annealing (glass) , chemistry , oxygen , oxide , binding energy , inorganic chemistry , phosphorus , torr , secondary ion mass spectrometry , ion , analytical chemistry (journal) , metallurgy , materials science , environmental chemistry , phosphate , organic chemistry , physics , nuclear physics , thermodynamics
The surface composition of deoxidized high phosphorus (DHP) copper sheets was investigated by ESCA with the aim of verifying the role of phosphorus in oxide formation. While no surface segregation of phosphorus was observed on samples cleaned by ion bombardment and annealing in ultrahigh vacuum, the presence of large amounts of phosphorus was found after the formation of the oxide by exposure to 0.1 Torr oxygen at 770 K. The surface enrichment in P with the same binding energy was found after annealing a sheet of DHP copper coated with a layer of Cu 2 O deposited by sputtering. The binding energy of the P 2p peak as well as the analysis of the components of O 1s can be interpreted with the formation of a metaphosphate. Experiments performed at intermediate temperatures showed that the segregation of phosphorus is appreciable above 600 K and appears to be related to oxygen diffusion into the bulk.