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Oxidation of metals by an oxygen ion beam in the MBE process
Author(s) -
Shimizu T.,
aka H.,
Arai K.
Publication year - 1992
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740190168
Subject(s) - x ray photoelectron spectroscopy , evaporation , oxygen , chemistry , ion , analytical chemistry (journal) , plasma , inorganic chemistry , ion beam , chemical engineering , environmental chemistry , physics , engineering , thermodynamics , organic chemistry , quantum mechanics
X‐ray photoelectron spectroscopy was used to study the oxidation of Cu by oxygen plasma generated from a Kaufman ion gun. It was found that Cu was much less oxidized in co‐evaporation with Ba or Nd compared to Cu‐only evaporation when the total flux density of supplied metals and the oxygen plasma conditions were similar. It was also found that elemental Ba or Nd deposited on a CuO film at room temperature deoxidized the CuO.