z-logo
Premium
Development of a hyperthermal oxygen‐atom generator
Author(s) -
Hoflund Gar B.,
Davidson Mark R.,
Outlaw R. A.
Publication year - 1992
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740190161
Subject(s) - flux (metallurgy) , oxygen , atomic physics , desorption , atom (system on chip) , chemistry , oxygen atom , electron , analytical chemistry (journal) , generator (circuit theory) , physics , adsorption , molecule , nuclear physics , thermodynamics , power (physics) , organic chemistry , chromatography , computer science , embedded system
Abstract A source that is compact, durable and mounts on a standard standard ultrahigh vacuum (UHV) flange has been developed for the generation of hyperthermal oxygen atoms. In this source oxygen atoms permeate through an Ag membrane held at 500°C and are then emitted toward the target from the vacuum side of the membrane by electron‐stimulated desorption. The current prototype model generates useable O‐atom fluxes of ∼10 12 atoms cm −2 s −1 , and future modifications should increase this flux by 1–3 orders of magnitude. Based on the O + energy distribution, the average O neutral energy is ∼5 eV with a fairly broad distribution (full width at half‐maximum ∼3.6 eV). The information required for the development of this source and the design of the source are prsented.

This content is not available in your region!

Continue researching here.

Having issues? You can contact us here