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Auger analysis of Ni/Au/Te and Au/Te Ohmic Contacts on n‐GaAs
Author(s) -
Bender H.,
Wuyts K.,
Watté J.,
Silverans R. E.
Publication year - 1992
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740190160
Subject(s) - ohmic contact , auger electron spectroscopy , auger , materials science , conductivity , analytical chemistry (journal) , chemistry , atomic physics , nanotechnology , physics , layer (electronics) , chromatography , nuclear physics
The characterization of Ni/Au/Te and Au/Te contacts on n‐GaAs by Auger electron spectroscopy is studied by surface element mapping and depth profiling. Owing to the high lateral resolution of AES, important characteristics of these metallization schemes, which could not be detected by any other technique, are revealed. Comparison with other analysis technique is performed, yielding important insight into the mechanism of ohmic conductivity.