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Preliminary results on multiple angular detection Auger spectroscopy
Author(s) -
Cazaux J.,
Bardoux T.,
Mouze D.,
Patat J. M.,
Salace G.,
Thomas X.,
Toth J.
Publication year - 1992
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740190138
Subject(s) - auger electron spectroscopy , analyser , auger , homogeneous , spectroscopy , spectral line , atomic physics , signal (programming language) , chemistry , analytical chemistry (journal) , optics , computational physics , physics , nuclear physics , statistical physics , computer science , quantum mechanics , astronomy , chromatography , programming language
From elementary calculations of the Auger signal intensities from a specimen at two different take‐off angles, θ 1 and θ 2 , it is shown that the simultaneous acquisition of these spectra allows homogeneous alloys and stratified samples to be identified and also the presence of topographic effects. The preliminary results confirm the potential of multiple angular detection Auger electron spectroscopy (MADAES) that can be developed by using only one analyser of cylindrical mirror type. Further developments are also indicated.