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Auger backscattering factor at primary beam energies above 10 keV
Author(s) -
Merlet C.,
Jbara O.,
Rondot S.,
Cazaux J.
Publication year - 1992
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740190137
Subject(s) - auger , auger electron spectroscopy , atomic physics , electron probe microanalysis , electron microprobe , ionization , substrate (aquarium) , chemistry , beam (structure) , electron , auger effect , cathode ray , analytical chemistry (journal) , physics , optics , nuclear physics , mineralogy , ion , oceanography , organic chemistry , chromatography , geology
Taking into account the identity of the ionization function of electron probe microanalysis (EPMA) at the surface, Φ(0), and the Auger backscattering factor, r , new results and a compilation of published results are reported for the determination of r [or Φ(0)] obtained at normal incidence and at primary beam energies E o above 10 keV. The 79 experimental values thus obtained have been compared to the functional expressions proposed by Love and Scott, by Merlet [both for Φ(0)] and by Shimizu for r , leading to standard deviations of 11.3, 8.6 and 10.8%, respectively. At last, a deviation of 8.4% has been obtained when the experimental results are compared to a functional expression involving only the element of interest, Z 1 , at the surface and the electron backscattering factor, η, of the substrate. The advantage of this last approach is that it can be applied to correct automatically the backscattering effects of the Auger images and of the Auger depth profiles by the simultaneous measurement of η with a calibrated backscattered electron detector, but without the knowledge of the (changing) bulk composition.