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Methods of electron spectra processing based on solving the transport equation of electron motion in a solid
Author(s) -
Borodyansky S.
Publication year - 1992
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740190135
Subject(s) - inelastic mean free path , electron , photoelectric effect , inelastic scattering , scattering , physics , core electron , mean free path , elastic scattering , computational physics , atomic physics , electron scattering , spectral line , optics , quantum mechanics
Within the transport approximation, the problem of the elastic and inelastic scattering of Auger electrons, photoelectrons and backscattered electrons is investigated. The use of an invariant‐embedding approach allows the derivation of analytical expressions for the path length distribution for both emitted and backscattered electrons. These functions are used to produce a new procedure for background subtraction in AES/XPS and to develop a technique of REELS processing to reconstruct both the electron differential energy loss cross‐section in a solid and the ratio λ i /λ tr , where λ i is the inelastic mean free path and λ tr is the transport path for elastic scattering.