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Background removal in x‐ray photoelectron spectroscopy
Author(s) -
Tokutaka Heizo,
Ishihara Naganori,
Nishimori Katsumi,
Kishida Satoru,
Isomoto Kazuhiro
Publication year - 1992
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740181002
Subject(s) - x ray photoelectron spectroscopy , range (aeronautics) , spectral line , kinetic energy , analytical chemistry (journal) , materials science , x ray , chemistry , nuclear magnetic resonance , physics , optics , environmental chemistry , quantum mechanics , astronomy , composite material
Background removal from x‐ray photoelectron spectra (XPS) was evaluated using the Shirley method and the Tougaard method. The effect of background removal over a range of kinetic energy was evaluated, and the Tougaard method was found to be effective over a wide energy range. In this paper we report a modification of the Tougaard method that is shown to provide satisfactory background removal from a wide range of XPS data.