Background removal in x‐ray photoelectron spectroscopy | Zendy

Tokutaka Heizo | Zendy; Ishihara Naganori | Zendy; Nishimori Katsumi | Zendy; Kishida Satoru | Zendy; Isomoto Kazuhiro | Zendy

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Background removal in x‐ray photoelectron spectroscopy

Author(s) -

Tokutaka Heizo,

Ishihara Naganori,

Nishimori Katsumi,

Kishida Satoru,

Isomoto Kazuhiro

Publication year - 1992

Publication title -

surface and interface analysis

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.52

H-Index - 90

eISSN - 1096-9918

pISSN - 0142-2421

DOI - 10.1002/sia.740181002

Subject(s) - x ray photoelectron spectroscopy , range (aeronautics) , spectral line , kinetic energy , analytical chemistry (journal) , materials science , x ray , chemistry , nuclear magnetic resonance , physics , optics , environmental chemistry , quantum mechanics , astronomy , composite material

Background removal from x‐ray photoelectron spectra (XPS) was evaluated using the Shirley method and the Tougaard method. The effect of background removal over a range of kinetic energy was evaluated, and the Tougaard method was found to be effective over a wide energy range. In this paper we report a modification of the Tougaard method that is shown to provide satisfactory background removal from a wide range of XPS data.

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