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Calibration of a basic secondary ion mass spectrometer, by means of elastic recoil detection, for hydrogen isotopes implanted into graphite
Author(s) -
Paynter R. W.,
Turgeon S.,
SabetSharghi R.,
Leblanc L.,
Pageau J. F.,
Ross G. G.
Publication year - 1992
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740180718
Subject(s) - elastic recoil detection , hydrogen , deuterium , ion , analytical chemistry (journal) , chemistry , mass spectrometry , graphite , secondary ion mass spectrometry , isotope , quadrupole mass analyzer , ion source , recoil , analyser , atomic physics , nuclear physics , physics , chromatography , organic chemistry
A secondary ion mass spectrometer equipped with a low‐resolution argon ion source and a small quadrupole ion mass analyser was calibrated for moderate to high concentrations of hydrogen and deuterium in graphite. The polished graphite samples were implanted with hydrogen isotope ions of 1 or 2 KeV energy. The depth profiles of the implanted hydrogen were determined by means of elastic recoil detection (ERD) and compared with those obtained by SIMS. Linear correlations were found between the peak D + /C + or CH + /C + ratio and the maximum D or H concentration determined by ERD, as well as between the integral of the SIMS profile curves and the total quantity of hydrogen isotope.