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The depth distribution function in Auger/XPS analysis
Author(s) -
Dwyer V. M.,
Richards J. M.
Publication year - 1992
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740180717
Subject(s) - auger , exponential function , x ray photoelectron spectroscopy , distribution function , boltzmann equation , function (biology) , exponential distribution , distribution (mathematics) , statistical physics , computational physics , physics , mathematical analysis , mathematics , atomic physics , statistics , thermodynamics , nuclear magnetic resonance , evolutionary biology , biology
An analysis of a recent three‐exponential approximation of the depth distribution function (DDF) for quantitative Auger/XPS analysis is presented and a comparison is made with an exact DDF obtained for an analytical solution to the Boltzmann transport equation in the transport approximation. Several problems with the approximate DDF are identified and, using the derived analytical form, an alternative two‐exponential DDF is suggested.