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Application of environmental electron spectroscopy to AES of bulk ceramics
Author(s) -
Ohlendorf G.,
Koch W.,
Kempter V.,
Borchardt G.
Publication year - 1991
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740171307
Subject(s) - auger electron spectroscopy , auger , ion , electron , spectral line , atomic physics , electron spectroscopy , auger effect , analytical chemistry (journal) , materials science , chemistry , nuclear physics , physics , environmental chemistry , organic chemistry , astronomy
Auger spectra from highly samples (Al 2 O 3 , Si 3 N 4 ) are collected in a gaseous environment. It is demonstrated that the build‐up of negative surface charge can be reduced considerably under suitable conditions. It is proposed that the decharging of the surface is initiated by Auger neutralization of the ions formed in the gaseous environment in collisions with the primary keV electrons.