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Depth profile analysis of an electrodeposited multilayer structure with non‐uniform thickness distribution by glow discharge optical spectroscopy
Author(s) -
Weiss Zdeněk
Publication year - 1991
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740170905
Subject(s) - glow discharge , materials science , anode , spectroscopy , distortion (music) , enhanced data rates for gsm evolution , signal (programming language) , copper , impact crater , optics , tube (container) , nickel , analytical chemistry (journal) , electrode , composite material , chemistry , optoelectronics , plasma , metallurgy , physics , amplifier , telecommunications , quantum mechanics , cmos , astronomy , chromatography , computer science , programming language
An electrodeposited multiplayer structure consisting of nine alternating layers of copper and nickel was depth profiled by glow discharge emission spectroscopy using a Grimm lamp with an anode tube of internal diameter 4 mm. Depth profiled of the non‐uniform region near the sample edge are reported. Thickness inhomogeneity causes the erosion crater bottom to penetrate through individual layers obliquely, which is the reason for signal response distortion. The dependence of signal response on the thickness gradient is discussed and a formula for the thickness gradient estimation from the depth profiles is proposed.