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Background removal in AES; influence of detection geometrical characteristics
Author(s) -
Rosenberg N.,
Tholomier M.,
Vicario E.
Publication year - 1991
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740170806
Subject(s) - auger , spectral line , symmetry (geometry) , spectrum analyzer , atomic physics , auger electron spectroscopy , electron , cross section (physics) , inelastic scattering , work (physics) , chemistry , physics , scattering , optics , nuclear physics , quantum mechanics , geometry , mathematics
In order to remove the inelastic background from Auger spectra, we took advantage of theoretical work assuming an experimental arrangement corresponding to cylindrical symmetry. The knowledge of the inelastic differential cross‐section K ( T ) is necessary for the background calculation ( T is the energy loss), so we calculated K ( T ) from back‐scattering spectra experimentally obtained using either a cylindrical mirror analyzer (cylindrical symmetry) or a hemispherical mirror analyzer (no cylindrical symmetry). The strict application of theoretical expressions may eventually lead to a K ( T ) function with some negative part, i. e. without physical meaning. We have interpreted this effect and we consequently succeeded in eliminating any negative part. In setting out the Auger spectra background, we took into account secondary electrons created by Auger electrons by introducing distinct laws for the spectra from the two analysers. ‘Intrinsic’ Auger spectra, obtained from elemental materials (Si, Ag, Ni, Cu) andregistered from either analyzer, were compared. Some minor differences remain, according to which analyzer is used.