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A marker technique to identify diffusing elements during initial reactions using ion scattering spectroscopy
Author(s) -
Schmidt Michael T.,
Wu Zhen,
Osgood Richard M.
Publication year - 1991
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740170111
Subject(s) - diffusion , spectroscopy , chemistry , ion , scattering , analytical chemistry (journal) , chemical physics , oxygen , monolayer , optics , thermodynamics , chromatography , physics , organic chemistry , quantum mechanics , biochemistry
A variation of classical marker techniques has been combined with low‐energy ion scattering spectroscopy (ISS) to study the diffusion of species during the initial formation of several reachted monolayers, allowing the study of thinner layers than standard marker techniques allow. Results are presented for the reaction of oxygen with GaAs under 248 nm laser illumination and at 400 °C, as well as for the well‐studied case of Ni oxidation at room information that can be obtained with his method. The results show that inward oxygen diffusion can be distinguished from outward metal diffusion as the reaction proceeds. This information is crucial for developing an understanding of reaction mechanisms in thin films.