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Determination of depth resolution parameters from AES sputtering profiles of multilayer structures with varying single layer thicknesses
Author(s) -
Zalar A.,
Hofmann S.
Publication year - 1990
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740160171
Subject(s) - sputtering , citation , high resolution , physics , materials science , engineering physics , analytical chemistry (journal) , library science , nanotechnology , computer science , chemistry , history , thin film , chromatography , archaeology