Premium
NiCo alloy as a new reference material for quantitative surface analysis
Author(s) -
Fujita D.,
Tanaka A.,
Goto K.,
Homma T.
Publication year - 1990
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740160136
Subject(s) - auger electron spectroscopy , sputtering , alloy , x ray photoelectron spectroscopy , inelastic mean free path , materials science , auger , analytical chemistry (journal) , ion , surface (topology) , scattering , homogeneous , atomic physics , chemistry , inelastic scattering , metallurgy , thermodynamics , thin film , physics , optics , nuclear magnetic resonance , nuclear physics , nanotechnology , geometry , mathematics , organic chemistry , chromatography
For the improvement of quantitative surface analysis using Auger electron spectroscopy (AES) we propose an NiCo alloy system as a candidate for a ‘primary reference material’ to be used for evaluating the accuracy of quantitative surface analysis. A NiCo alloy was chosen for two reasons. Firstly, the concentrations of the alloys (Ni 49 Co 51 ,Ni 75 Co 25 ) at the surface and in the near‐surface region were found to be homogeneous, i.e. phenomena such as preferential sputtering and ion irradiation‐induced surface segregation were no observed with angle‐resolved XPS measurements during 1 keV Ar + ion sputtering. Secondly, the corrections of matrix effects of NiCo alloys, such as the atomic density, the back‐scattering factor and inelastic mean free path corrections, were calculated and found to be negligibly small.