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Quantitative AES: Calibration of spectrometers for true spectral measurements—results of a VAMAS round robin and recommendations for acquiring reference data banks
Author(s) -
Seah M. P.,
Smith G. C.
Publication year - 1990
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740160133
Subject(s) - calibration , spectrometer , spectral line , metrology , range (aeronautics) , measure (data warehouse) , energy (signal processing) , intensity (physics) , optics , computational physics , physics , computer science , engineering , aerospace engineering , quantum mechanics , astronomy , database
As a result of careful calibration, a metrology spectrometer has been developed at the National Physical Laboratory (NPL) to give true spectra. This instrument has been used to measure the true spectra from three reference materials under defined conditions in AES. Measurements for these reference materials, on any other instrument, allow that instrument's intensity–energy response function to be calibrated so that that instrument, in turn, may produce true spectra. In a VAMAS interlaboratory assessment involving 38 respondees, these methods and data have been tested. The results show that AES instruments may be calibrated over the energy range 10–2500 eV to give true spectra to an accuracy in the range 1.5–3.0% in the direct mode and ∼12% in the differential mode. For the first time, all these instruments may be calibrated to give: (1) the same spectra; and (2) spectra in which the instrumental systematic intensity errors are reduced to the above levels.