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A microbeam analytical study of a‐C: H films
Author(s) -
Fitzgerald A. G.,
Henderson A. E.,
Storey B. E.
Publication year - 1990
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.7401601104
Subject(s) - microbeam , carbon fibers , carbon film , chemical vapor deposition , x ray photoelectron spectroscopy , hydrocarbon , deposition (geology) , hydrogen , analytical chemistry (journal) , sputtering , materials science , ion beam , ion , diamond , thin film , chemistry , chemical engineering , nanotechnology , organic chemistry , composite material , optics , paleontology , physics , engineering , sediment , composite number , biology
Carbon films prepared by sputtering, ion beam deposition methods and chemical and physical vapour deposition methods have been studied by a range of microbeam analytical techniques. The presence of hydrogen and hydrocarbon components in these films has been established regardless of whether hydrocarbon gas is used in the deposition process. The α‐carbyne and diamond modifications of carbon have been identified in some of these films. The sensitivity of these carbon films to electron and ion irradiation is discussed. The form of carbon bonding has been investigated by x‐ray photoelectron spectroscopy.