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Ion microprobe for studying cluster ion decay reactions
Author(s) -
Bekkerman A. D.,
Dzhemilev N. Kh.,
Rotstein V. M.
Publication year - 1990
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740151003
Subject(s) - microprobe , ion , fragmentation (computing) , cluster (spacecraft) , chemistry , mass spectrum , atomic physics , spectral line , analytical chemistry (journal) , physics , mineralogy , organic chemistry , chromatography , astronomy , computer science , programming language , operating system
In the present paper, an ion microprobe is used to study the fragmentation regularities of Al n + and Si n + cluster ions sputtered under ion bombardment. The results have shown that the ions formed during cluster fragmentation, along the path from the target to the detector, transform the mass spectra of both charged and neutral components and the energy distribution of the parent cluster and monomer ions.