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Quantitative AES: Determination of the effects of the relative orientations of the sample, electron gun and spectrometer on the direct spectrum shape for the establishment of standard reference spectra
Author(s) -
Smith G. C.,
Seah M. P.
Publication year - 1989
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740141204
Subject(s) - spectrometer , spectral line , calibration , detector , sample (material) , angle of incidence (optics) , optics , tracing , reference data , chemistry , analytical chemistry (journal) , computational physics , physics , computer science , chromatography , quantum mechanics , astronomy , operating system , database
The precise shape of the whole direct spectrum in AES depends on the processes in the sample and on the properties of the measurement system. In this paper we characterize, in detail, the intensities emitted from ion sputter‐cleaned copper and silver foils in the direct spectrum in order to understand better the processes in the sample controlling those intensities. Characterizations of the dependencies of the intensities on the angle of incidence of the electron beam and on the angle of emission of the detected electrons provide rules allowing the transference of reference spectra between different instrumental cinfigurations and conditions. The precise evaluation of the rules is essential if reference data banks are to be transferred for instrument to instrument. Furthermore, by tracing the spectra back to an instrument with known properties we may establish standard reference spectra, which may then be used to calibrate, in other instruments, the combined energy dependencies of the spectrometer transmission function and detector sensitivity with accuracy. This calibration enables all instruments to be used to measure true spectra for the first time.