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Quantitative trace analysis of technical materials with solid state mass spectrometry: An analytical strategy for SIMS
Author(s) -
Grasserbauer M.,
Stingeder G.,
Friedbacher G.,
Virag A.
Publication year - 1989
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740141011
Subject(s) - characterization (materials science) , solid state , mass spectrometry , analytical technique , quantitative analysis (chemistry) , chemistry , trace (psycholinguistics) , analytical chemistry (journal) , computer science , process engineering , materials science , nanotechnology , chromatography , engineering , linguistics , philosophy , organic chemistry
Based on an evaluation of important solid state mass spectrometric techniques regarding detection power, potential for quantitative analysis and applicability, an analytical strategy for the quantitative analysis of technical materials with high‐performance SIMS that has the broadest applicability of all solid state mass spectrometry techniques is discussed. The major topics dealt with are reduction of random and systematic errors, preparation and characterization of suitable reference materials and assessment of precision and accuracy. It is intended to demonstrate that extensive procedures have to be applied to obtain accurate quantitative results—not only for SIMS but also for the other solid state mass spectrometric techniques.