Premium
The precise determination of concentration distributions using depth‐sectioning methods
Author(s) -
Katardjiev I. V.,
Nobes M. J.,
Carter G.
Publication year - 1989
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740140914
Subject(s) - yield (engineering) , sputtering , flux (metallurgy) , chemistry , atomic physics , analytical chemistry (journal) , materials science , physics , thermodynamics , nanotechnology , environmental chemistry , thin film , organic chemistry
Consideration of the continuity equation relating atomic fluxes entering and leaving a layer from the instantaneous surface to a fixed depth beyond the extent of any atomic relocation shows that measurements of total atomic exit flux, of a given species, the rate of change with time of the species concentration over the fixed depth, and sputtering speed, can yield initial depth distributions of the atomic species.
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom