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The precise determination of concentration distributions using depth‐sectioning methods
Author(s) -
Katardjiev I. V.,
Nobes M. J.,
Carter G.
Publication year - 1989
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740140914
Subject(s) - yield (engineering) , sputtering , flux (metallurgy) , chemistry , atomic physics , analytical chemistry (journal) , materials science , physics , thermodynamics , nanotechnology , environmental chemistry , thin film , organic chemistry
Consideration of the continuity equation relating atomic fluxes entering and leaving a layer from the instantaneous surface to a fixed depth beyond the extent of any atomic relocation shows that measurements of total atomic exit flux, of a given species, the rate of change with time of the species concentration over the fixed depth, and sputtering speed, can yield initial depth distributions of the atomic species.