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Use of secondary molecular ions in Cs‐SIMS elemental analysis
Author(s) -
Gao Y.
Publication year - 1989
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740140910
Subject(s) - ion , elemental analysis , secondary ion mass spectrometry , chemistry , analytical chemistry (journal) , materials science , inorganic chemistry , environmental chemistry , organic chemistry
We have investigated three factors in the use of secondary molecular ions in Cs‐SIMS elemental analysis: increase of ion yield, quantification and reduction of the matrix effect.