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Study of SIMS argon ion gun for quantitative surface analysis
Author(s) -
Zhanping Li,
Jianhua Wang,
Youzhe Li,
Pijin Chen
Publication year - 1989
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740140904
Subject(s) - ion gun , ion , ion beam deposition , ion beam , ion source , atomic physics , beam (structure) , ion beam mixing , argon , chemistry , aperture (computer memory) , materials science , analytical chemistry (journal) , optics , physics , organic chemistry , chromatography , acoustics
A new appartus for measuring the energy distribution of an axial ion beam is decribed in this paper. Because this apparatus is combined with an ion gun exit aperture, the assembly error has been decreased. Hence, it is possible to measure an energy spread as low as 0.36 eV. In addition, the total and axial energy distribution of the ions from the ion source and the lenses of the Kornelsen gun are measured. The variation of ion beam current, ion beam density and minimum beam diameter with a change of pressure in the ion source and ion energy have also been described. Also, a semi‐empirical formula for the relation of ion beam diameter d with ion energy E and ion source pressure P is given as\documentclass{article}\pagestyle{empty}\begin{document}$$d = k(p)/\sqrt {E{\rm }} + f(p)$$ \end{document}