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Quantitative Auger electron spectroscopy of binary systems. Matrix correction
Author(s) -
Zagorenko A. I.,
Zaporozchenko V. I.
Publication year - 1989
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740140803
Subject(s) - auger , auger electron spectroscopy , vanadium , matrix (chemical analysis) , electron , auger effect , chemistry , binary number , atomic physics , range (aeronautics) , analytical chemistry (journal) , materials science , physics , inorganic chemistry , mathematics , nuclear physics , arithmetic , chromatography , composite material
The matrix correction factor, M , has been determined for 1953 binary systems. The calculated M values are in the range 0.3–2.6. The probable error, with no account being taken of the matrix effect, is 30%. A study has been made of the effect on M of different methods of calculation, the experimental conditions of the analysis, the choice of the Auger lines and the concentration of the system analysed. The greatest effect on M values is the choice of equations used for calculating the escape depth of the Auger electrons. Measurements of concentrations were carried out on scribed samples of cobalt, vanadium, iron and copper silicides, and lead telluride. On the basis of a comparison of the known bulk concentrations and the calculated values, an expression has been chosen for calculating the escape depth of the Auger electrons that gives the best results.