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Experiments on imaging X‐ray analytical methods
Author(s) -
Gurker N.,
Ebel M. F.,
Ebel H.,
Hedrich H.,
Bavdaz M.,
Giefing G.
Publication year - 1989
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740140402
Subject(s) - photoelectric effect , x ray photoelectron spectroscopy , x ray , radiation , software , optics , computer science , physics , computational physics , materials science , nuclear magnetic resonance , programming language
X‐ray induced analysis of matter offers solutions to a great variety of analyst's questions in various disciplines. Based on the physical nature of primary interaction (photoelectric absorption, elastic/inelastic scattering) and on the secondary specimen response (modulated primary radiation, fluorescent radiation, photoelectrons, Auger electrons), a powerful family of different analytical techniques has evolved. This paper emphasizes the methods of x‐ray photoeletron spectrometry (XPS) and x‐ray fluorescence analysis (XRF), covering depth information ranging from ca. 1 nm (XPS) to > 10 μm (XRF). Scanning schemes to extract spatial resolution of the specific analytical signal are presented. These methods operate in (hardware‐based) line‐selection modes during data acquisition and are essentially based on computer‐(software‐)aided data decoding to achieve point information (element map). Operating principles, alternative concepts, experimental set ups, results and some future trends are summarized.