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Auger electron spectroscopy from elemental standards. I: Theoretical calculations
Author(s) -
Batchelor D. R.,
Rez P.,
Fathers D. J.,
Venables J. A.
Publication year - 1988
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740130405
Subject(s) - atomic physics , auger electron spectroscopy , tungsten , ionization , scattering , chemistry , range (aeronautics) , electron , electron scattering , ab initio quantum chemistry methods , ab initio , auger , auger effect , physics , materials science , nuclear physics , ion , optics , organic chemistry , molecule , composite material
New calculations of electron impact ionization cross‐sections and back‐scattering correction factors have been undertaken for comparison with experiment. The ionization cross‐sections were obtained from ab initio Hartree–Fock–Slater calculations and the back‐scattering correction factors from the solution of the Boltzmann transport equation. The cross‐sections and correction factors have been calculated for the elements silicon, copper, silver and tungsten over the energy range 0.3–30 kV and the incident angle range 0–90°. These calculations are compared with previous calculations available in the literature.